Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask
Journal article, 1998

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Göran Stemme

Journal of Micromechanics and Microengineering, 8

84-87

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Production

Materials Science

Subject Categories

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Roots

Basic sciences

More information

Created

10/6/2017