Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask
Journal article, 1998
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
Journal of Micromechanics and Microengineering, 8
84-87
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Production
Materials Science
Subject Categories (SSIF 2011)
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Roots
Basic sciences