Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors
Journal article, 2001

Author

Korbinian Kunz

Peter Enoksson

Department of Microelectronics

Göran Stemme

Sensors and Actuators A

92 156-160

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Subject Categories

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/6/2017