Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors
Journal article, 2001
Author
Korbinian Kunz
Peter Enoksson
Department of Microelectronics
Göran Stemme
Sensors and Actuators A
92 156-160
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Production
Subject Categories
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering