A high-stroke, high-pressure electrostatic actuator for valve applications
Journal article, 2002
Author
W. van der Wijngaart
H. Ask
Peter Enoksson
Department of Microelectronics
Göran Stemme
Sensors and Actuators, A: Physical
Vol. 100 2-3 264-271c
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Production