A high-stroke, high-pressure electrostatic actuator for valve applications
Journal article, 2002

Author

W. van der Wijngaart

H. Ask

Peter Enoksson

Department of Microelectronics

Göran Stemme

Sensors and Actuators, A: Physical

Vol. 100 2-3 264-271c

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Production

More information

Created

10/7/2017