A free-hanging strain-gauge for ultraminiaturized pressure sensors
Journal article, 2002
Author
P. Melvås
Edvard Kälvesten
Peter Enoksson
Department of Microelectronics
Göran Stemme
Sensors and Actuators, A: Physical
Vol. 97-98 75-82
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Surgery
Industrial Biotechnology
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Production
Life Science Engineering (2010-2018)