Vibration mode investigation of a resonant silicon tube for use as a fluid density sensor
Paper in proceedings, 1995

Author

Peter Enoksson

Department of Microelectronics

Göran Stemme

Erik Stemme

IEEE International Workshop on Micro Electromechanical Systems (1995 MEMS), Jan. 29- Feb. 2, 1995, Amsterdam, The Netherlands

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Mechanical Engineering

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Electrical Engineering, Electronic Engineering, Information Engineering

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Nanoscience and Nanotechnology (2010-2017)

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Created

10/6/2017