Vibration mode investigation of a resonant silicon tube for use as a fluid density sensor
Paper in proceeding, 1995
Author
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
IEEE International Workshop on Micro Electromechanical Systems (1995 MEMS), Jan. 29- Feb. 2, 1995, Amsterdam, The Netherlands
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Energy
Life Science Engineering (2010-2018)