Silicon tube structures for a fluid density sensor
Paper in proceedings, 1995

Author

Peter Enoksson

Department of Microelectronics

Göran Stemme

Erik Stemme

The 8th International Conference on Solid-State Sensors (TRANSDUCERS'95), Stockholm, Sweden, June 25-29

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Transport

Production

Energy

Life Science Engineering (2010-2018)

More information

Created

10/6/2017