A valve-less planar pump isotropically etched in silicon
Paper in proceeding, 1995
Author
Anders Olsson
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
The Sixth Micromechanics Europe Workshop (MME'95), Copenhagen, Denmark, Sept. 3-5
120-123
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Information and Communication Technology
Life Science Engineering (2010-2018)