A Coriolis mass flow sensor structure in silicon
Paper in proceeding, 1996
Author
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
IEEE International Workshop on Micro Electromechanical Systems (1996 MEMS), Feb. 11-15, San Diego, USA
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Transport
Energy
Life Science Engineering (2010-2018)