A Coriolis mass flow sensor structure in silicon
Paper in proceedings, 1996

Author

Peter Enoksson

Department of Microelectronics

Göran Stemme

Erik Stemme

IEEE International Workshop on Micro Electromechanical Systems (1996 MEMS), Feb. 11-15, San Diego, USA

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Transport

Energy

Life Science Engineering (2010-2018)

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Created

10/6/2017