An improved valve-less pump fabricated using deep reactive ion etching
Paper in proceeding, 1996
Author
Anders Olsson
Peter Enoksson
Department of Microelectronics
Göran Stemme
Erik Stemme
IEEE 9th International Workshop on Micro Electro Mechanical Systems (MEMS'96), San Diego, California, USA, Feb. 10-15
479-484
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Industrial Biotechnology
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Production
Life Science Engineering (2010-2018)