An improved valve-less pump fabricated using deep reactive ion etching
Paper in proceedings, 1996

Author

Anders Olsson

Peter Enoksson

Department of Microelectronics

Göran Stemme

Erik Stemme

IEEE 9th International Workshop on Micro Electro Mechanical Systems (MEMS'96), San Diego, California, USA, Feb. 10-15

479-484

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Industrial Biotechnology

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Production

Life Science Engineering (2010-2018)

More information

Created

10/6/2017