Gas Damping of Electrostatically Excited Resonators
Paper in proceedings, 1996

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Göran Stemme

EUROSENSORS X, Leuven, Belgium, Sept. 8-11

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Transport

Production

More information

Created

10/6/2017