New Structure for Corner Compensation in Anisotropic KOH-etching
Paper in proceeding, 1996
Author
Peter Enoksson
Department of Microelectronics
The Seventh Micromechanics Europe Workshop (MME'96), Oct. 21-22, Barcelona, Spain
Subject Categories
Materials Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Production
Materials Science