New Structure for Corner Compensation in Anisotropic KOH-etching
Paper in proceedings, 1996

Author

Peter Enoksson

Department of Microelectronics

The Seventh Micromechanics Europe Workshop (MME'96), Oct. 21-22, Barcelona, Spain

Subject Categories

Materials Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Production

Materials Science

More information

Created

10/6/2017