Low pressure encapsulated resonant structures excited electrostatically
Paper in proceeding, 1997
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
Transducers'97, June 16-19, Chicago, USA
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Production