Low pressure encapsulated resonant structures excited electrostatically
Paper in proceedings, 1997

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Göran Stemme

Transducers'97, June 16-19, Chicago, USA

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Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Production

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Created

10/6/2017