Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask
Paper in proceedings, 1997

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Göran Stemme

The 8th Micromechanics Europe Workshop (MME'97), Sept. 1-2, Southampton, England

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Production

Materials Science

Subject Categories

Materials Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Created

10/7/2017