Deep wet etching of borosilicate glass using an anodically bonded silicon substrate as mask
Paper in proceeding, 1997
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
The 8th Micromechanics Europe Workshop (MME'97), Sept. 1-2, Southampton, England
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Production
Materials Science
Subject Categories
Materials Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering