Encapsulation of silicon resonant structures
Paper in proceeding, 1998
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Göran Stemme
Micro Structure Workshop 1998 (MSW’98), March 26-27, Uppsala, Sweden
Subject Categories (SSIF 2011)
Mechanical Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Production
Materials Science