Encapsulation of silicon resonant structures
Paper in proceedings, 1998

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Göran Stemme

Micro Structure Workshop 1998 (MSW’98), March 26-27, Uppsala, Sweden

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Materials Science

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Created

10/7/2017