Novel burst technology for closed loop detection and excitation of resonant silicon sensors
Paper in proceeding, 1999
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Kjell Norén
Göran Stemme
Transducers´99, June 7-10, Sendai, Japan
Subject Categories (SSIF 2011)
Mechanical Engineering
Materials Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Production
Materials Science