Novel burst technology for closed loop detection and excitation of resonant silicon sensors
Paper in proceedings, 1999
Author
Thierry Corman
Peter Enoksson
Department of Microelectronics
Kjell Norén
Göran Stemme
Transducers´99, June 7-10, Sendai, Japan
Subject Categories
Mechanical Engineering
Materials Engineering
Other Engineering and Technologies
Chemical Engineering
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Information and Communication Technology
Nanoscience and Nanotechnology (2010-2017)
Transport
Production
Materials Science