Novel burst technology for closed loop detection and excitation of resonant silicon sensors
Paper in proceedings, 1999

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Kjell Norén

Göran Stemme

Transducers´99, June 7-10, Sendai, Japan

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Mechanical Engineering

Materials Engineering

Other Engineering and Technologies

Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Materials Science

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Created

10/7/2017