Novel burst technology for closed loop detection and excitation of resonant silicon sensors
Paper in proceedings, 1999

Author

Thierry Corman

Peter Enoksson

Department of Microelectronics

Other publications Research

Kjell Norén

Göran Stemme

Transducers´99, June 7-10, Sendai, Japan

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Mechanical Engineering

Materials Engineering

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Chemical Engineering

Electrical Engineering, Electronic Engineering, Information Engineering

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Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Materials Science

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Created

10/7/2017

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