A low-pressure encapsulated DRIE resonant pressure sensor electrically excited and detected using `burst’ technology
Paper in proceedings, 1999

Author

Jessica Melin

Peter Enoksson

Department of Microelectronics

Thierry Corman

Göran Stemme

MME´99, Sept. 27-28, Gif-sus-Yvette, France

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Information and Communication Technology

Transport

Production

Energy

Materials Science

More information

Created

10/7/2017