Development of micromechanical and optical devices incorporating deposited PZT films
Paper in proceedings, 2000

Author

R. V. Wright

A. Patel

M. Pealat

R. Nonninger

R. Diels

Peter Enoksson

Department of Microelectronics

C. Fox

P. Netter

12th International Symposium on Integrated Ferroelectrics (ISIF 2000), Aachen, Germany, March 12-15

Subject Categories

Mechanical Engineering

Materials Engineering

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Information and Communication Technology

Transport

Production

Materials Science

More information

Created

10/7/2017