Development of micromechanical and optical devices incorporating deposited PZT films
Paper in proceeding, 2000
Author
R. V. Wright
A. Patel
M. Pealat
R. Nonninger
R. Diels
Peter Enoksson
Department of Microelectronics
C. Fox
P. Netter
12th International Symposium on Integrated Ferroelectrics (ISIF 2000), Aachen, Germany, March 12-15
Subject Categories
Mechanical Engineering
Materials Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Information and Communication Technology
Transport
Production
Materials Science