Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors
Paper in proceedings, 2000

Author

Korbinian Kunz

Peter Enoksson

Department of Microelectronics

Robert Wright

Göran Stemme

EUROSENSORS XIV, Copenhagen, Denmark, Aug. 27-30

Subject Categories

Mechanical Engineering

Materials Engineering

Other Engineering and Technologies

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Transport

Materials Science

More information

Created

10/7/2017