Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors
Paper in proceeding, 2000
Author
Korbinian Kunz
Peter Enoksson
Department of Microelectronics
Robert Wright
Göran Stemme
EUROSENSORS XIV, Copenhagen, Denmark, Aug. 27-30
Subject Categories
Mechanical Engineering
Materials Engineering
Other Engineering and Technologies
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Transport
Materials Science