Barbed Spikes for Mechanical Chip Attachment
Paper in proceeding, 2001
Author
Patrick Griss
Peter Enoksson
Department of Microelectronics
Göran Stemme
IEEE International Workshop on Micro Electromechanical Systems (MEMS2001), Interlaken, Switzerland, Jan. 21-25
46-49
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Industrial Biotechnology
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Life Science Engineering (2010-2018)