Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity
Paper in proceedings, 2001

Author

P. Melvås

Edvard Kälvesten

Peter Enoksson

Department of Microelectronics

Göran Stemme

The 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'01 / Eurosensors XV), Munich, Germany

Subject Categories

Mechanical Engineering

Other Engineering and Technologies

Industrial Biotechnology

Electrical Engineering, Electronic Engineering, Information Engineering

Areas of Advance

Life Science Engineering (2010-2018)

More information

Created

10/7/2017