Miniaturized pressure sensor using a free hanging strain-gauge with leverage effect for increased sensitivity
Paper in proceeding, 2001
Author
P. Melvås
Edvard Kälvesten
Peter Enoksson
Department of Microelectronics
Göran Stemme
The 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS'01 / Eurosensors XV), Munich, Germany
Subject Categories
Mechanical Engineering
Other Engineering and Technologies
Industrial Biotechnology
Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Life Science Engineering (2010-2018)