Linear variable optical filter-based ultraviolet microspectrometer
Journal article, 2012

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

roughness

resolution

chip

mirrors

uv

spectroscopy

Author

A. Emadi

Delft University of Technology

H. Wu

Delft University of Technology

G. De Graaf

Delft University of Technology

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

J. H. Correia

University of Minho

R. F. Wolffenbuttel

Delft University of Technology

Applied Optics

1559-128X (ISSN) 2155-3165 (eISSN)

Vol. 51 19 4308-4315

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Subject Categories

Atom and Molecular Physics and Optics

DOI

10.1364/AO.51.004308

More information

Latest update

5/14/2018