Linear variable optical filter-based ultraviolet microspectrometer
Artikel i vetenskaplig tidskrift, 2012

An IC-compatible linear variable optical filter (LVOF) for application in the UV spectral range between 310 and 400 nm has been fabricated using resist reflow and an optimized dry-etching. The LVOF is mounted on the top of a commercially available CMOS camera to result in a UV microspectrometer. A special calibration technique has been employed that is based on an initial spectral measurement on a xenon lamp. The image recorded on the camera during calibration is used in a signal processing algorithm to reconstruct the spectrum of the mercury lamp and the calibration data is subsequently used in UV spectral measurements. Experiments on a fabricated LVOF-based microspectrometer with this calibration approach implemented reveal a spectral resolution of 0.5 nm.

roughness

resolution

chip

mirrors

uv

spectroscopy

Författare

A. Emadi

Technische Universiteit Delft

H. Wu

Technische Universiteit Delft

G. De Graaf

Technische Universiteit Delft

Peter Enoksson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Elektronikmaterial och system

J. H. Correia

Universidade do Minho

R. F. Wolffenbuttel

Technische Universiteit Delft

Applied Optics

1559-128X (ISSN) 2155-3165 (eISSN)

Vol. 51 4308-4315

Styrkeområden

Nanovetenskap och nanoteknik

Transport

Produktion

Ämneskategorier

Atom- och molekylfysik och optik

DOI

10.1364/AO.51.004308