Investigation of gate edge effects on interface traps densities in 3C-SiC MOS capacitors
Journal article, 2012
Author
T. Gutt
T. Malakowski
H. M. Przewlocki
Olof Engström
Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory
M. Bakowski
R. Esteve
Material Science and Engineering B
2161-6221 (ISSN)
Vol. 177 1327-Subject Categories
Materials Engineering
Other Electrical Engineering, Electronic Engineering, Information Engineering
Areas of Advance
Materials Science