Comparing silicon deposition techniques for visible-blind detector fabrication
Paper in proceeding, 2012
Author
A. Emadi
Peter Enoksson
Chalmers, Applied Physics, Electronics Material and Systems
J. H. Correia
R. F. Wolffenbuttel
MME 2012, Micromechanics and Microsystems Europe Workshop September 9 - 12, 2012, Ilmenau, Germany
Areas of Advance
Nanoscience and Nanotechnology (SO 2010-2017, EI 2018-)
Transport
Production
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering
Nano Technology