Comparing silicon deposition techniques for visible-blind detector fabrication
Paper in proceedings, 2012

Author

A. Emadi

Peter Enoksson

Chalmers, Applied Physics, Electronics Material and Systems Laboratory

J. H. Correia

R. F. Wolffenbuttel

MME 2012, Micromechanics and Microsystems Europe Workshop September 9 - 12, 2012, Ilmenau, Germany

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Transport

Production

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

Nano Technology

More information

Created

10/6/2017