Tunable FBARs: Intrinsic vs. extrinsic tunability
Paper in proceedings, 2012

The methods used to make the Film Bulk Acoustic Resonators (FBAR) tunable is reviewed. Intrinsically tunable FBARs make use ferroelectrics in ferroelectric and paraelectric (non-polar) phases have tunabilities up to 5% and more. Extrinsically tunable resonators are based on traditional piezoelectric FBARs and make use of external varactors and inductors. The low tunability (<2%) and low Q-factor (Q<100 due to tuning components) limits applications of these resonators.

Acoustic resonator

Tunable FBAR

FBAR

Author

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

IEEE MTT-S International Microwave Symposium Digest

0149645X (ISSN)

6258382
978-146731087-1 (ISBN)

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

DOI

10.1109/MWSYM.2012.6258382

ISBN

978-146731087-1

More information

Created

10/7/2017