Tunable FBARs: Intrinsic vs. extrinsic tunability
Paper i proceeding, 2012

The methods used to make the Film Bulk Acoustic Resonators (FBAR) tunable is reviewed. Intrinsically tunable FBARs make use ferroelectrics in ferroelectric and paraelectric (non-polar) phases have tunabilities up to 5% and more. Extrinsically tunable resonators are based on traditional piezoelectric FBARs and make use of external varactors and inductors. The low tunability (<2%) and low Q-factor (Q<100 due to tuning components) limits applications of these resonators.

Acoustic resonator

Tunable FBAR

FBAR

Författare

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Andrei Vorobiev

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

IEEE MTT-S International Microwave Symposium Digest

0149645X (ISSN)

6258382

Ämneskategorier

Elektroteknik och elektronik

DOI

10.1109/MWSYM.2012.6258382

ISBN

978-146731087-1

Mer information

Skapat

2017-10-07