Tunable FBARs: Intrinsic vs. extrinsic tunability
Paper i proceeding, 2012
The methods used to make the Film Bulk Acoustic Resonators (FBAR) tunable is reviewed. Intrinsically tunable FBARs make use ferroelectrics in ferroelectric and paraelectric (non-polar) phases have tunabilities up to 5% and more. Extrinsically tunable resonators are based on traditional piezoelectric FBARs and make use of external varactors and inductors. The low tunability (<2%) and low Q-factor (Q<100 due to tuning components) limits applications of these resonators.
Acoustic resonator
Tunable FBAR
FBAR
Författare
Spartak Gevorgian
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
Andrei Vorobiev
Chalmers, Mikroteknologi och nanovetenskap, Terahertz- och millimetervågsteknik
IEEE MTT-S International Microwave Symposium Digest
0149645X (ISSN)
6258382978-146731087-1 (ISBN)
Ämneskategorier (SSIF 2011)
Elektroteknik och elektronik
DOI
10.1109/MWSYM.2012.6258382
ISBN
978-146731087-1