Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy
Journal article, 2013
We report a study on the spatial homogeneity and nitridation of a nanopattern template using a spectroscopic photoemission and low energy electron microscopy. The template was composed of Al nanodots which were patterned into a SiO2/Si(1 1 1) surface using e-beam lithography and reactive ion etching. The template exhibited a global inhomogeneity in terms of the local topography, Al composition and structure of the individual nanopatterns. After nitridation, the individual nanopatterns were diminished, more corrugated and faceted. The nitridated nanopatterns were structurally ordered but differently orientated. The nitridation effectively removed the fluorine contaminants by decomposition of the fluorocarbon sidewalls, resulting in the AlN nanopatterns and partially nitridated Si substrate surface outside the nanopattern domains.
selective growth
AlN
mirror operation mode
chemistry
ammonia
thin-films
Nanopattern
1981
contrast
journal of vacuum science & technology
substrate
p1418
molecular-beam epitaxy
Nitridation
inn jd
Spectroscopic photoemission and low-energy electron microscopy
speleem
surface
v19
Author
B. Qi
University of Iceland
S. Olafsson
University of Iceland
A. A. Zakharov
Lund University
M. Gothelid
MAP
Björn Agnarsson
Chalmers, Applied Physics, Biological Physics
H. P. Gislason
University of Iceland
Applied Surface Science
0169-4332 (ISSN)
Vol. 264 349-357Subject Categories
Physical Sciences
DOI
10.1016/j.apsusc.2012.10.025