Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy
Artikel i vetenskaplig tidskrift, 2013

We report a study on the spatial homogeneity and nitridation of a nanopattern template using a spectroscopic photoemission and low energy electron microscopy. The template was composed of Al nanodots which were patterned into a SiO2/Si(1 1 1) surface using e-beam lithography and reactive ion etching. The template exhibited a global inhomogeneity in terms of the local topography, Al composition and structure of the individual nanopatterns. After nitridation, the individual nanopatterns were diminished, more corrugated and faceted. The nitridated nanopatterns were structurally ordered but differently orientated. The nitridation effectively removed the fluorine contaminants by decomposition of the fluorocarbon sidewalls, resulting in the AlN nanopatterns and partially nitridated Si substrate surface outside the nanopattern domains.

selective growth

AlN

mirror operation mode

chemistry

ammonia

thin-films

Nanopattern

1981

contrast

journal of vacuum science & technology

substrate

p1418

molecular-beam epitaxy

Nitridation

inn jd

Spectroscopic photoemission and low-energy electron microscopy

speleem

surface

v19

Författare

B. Qi

Háskóli Íslands

S. Olafsson

Háskóli Íslands

A. A. Zakharov

Lunds universitet

M. Gothelid

MAP

Björn Agnarsson

Chalmers, Teknisk fysik, Biologisk fysik

H. P. Gislason

Háskóli Íslands

Applied Surface Science

0169-4332 (ISSN)

Vol. 264 349-357

Ämneskategorier

Fysik

DOI

10.1016/j.apsusc.2012.10.025