Intrinsically tunable 0.67 BiFeO3-0.33 BaTiO3 thin film bulk acoustic wave resonators
Journal article, 2012

Intrinsically tunable 0.67BiFeO3-0.33 BaTiO3(BF–BT) thin film bulk acoustic wave resonators with record high tunability of 4.4% and effective electromechanical coupling coefficient of 10% are fabricated and analyzed. The analysis, based on the theory of the dc field induced piezoelectric effect with the mechanical loading by the electrodes taken into account, reveals that the enhanced parameters are associated with the inherently high BF–BT electrostriction coefficient, which is found to be 5.9x1010 m/F. The Q-factor of the BF–BT resonators is up to 220 at 4.1 GHz and is limited mainly by acoustic wave scattering at reflection from a relatively rough top interface.

Ferroelecric

microwave film acoustic resonator

tunable FBAR

multiferroic

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Norayr Martirosyan

State Engineering University of Armenia

Markus Löffler

Chalmers, Applied Physics, Microscopy and Microanalysis

Chalmers, Applied Physics, Eva Olsson Group

Eva Olsson

Chalmers, Applied Physics, Eva Olsson Group

Chalmers, Applied Physics, Microscopy and Microanalysis

Applied Physics Letters

0003-6951 (ISSN) 1077-3118 (eISSN)

Vol. 101 23 232903-232903-5- 232903

Switchable and tunable composite film bulk acoustic wave resonators (CompFBAR)

Swedish Research Council (VR), 2012-01-01 -- 2014-12-31.

Areas of Advance

Information and Communication Technology

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Roots

Basic sciences

Driving Forces

Innovation and entrepreneurship

Subject Categories

Other Physics Topics

Condensed Matter Physics

Infrastructure

Nanofabrication Laboratory

DOI

10.1063/1.4769346

More information

Created

10/7/2017