Characterization Of Spontaneously Bonded Hydrophobic Silicon Surfaces
Journal article, 1994
Author
Karin Ljungberg
Anders Soderbarg
Stefan Bengtsson
Department of Solid State Electronics
Anders Jauhiainen
Department of Solid State Electronics
Journal Of The Electrochemical Society
Vol. 141 2 562-566
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering