Semiconductor Wafer Bonding: Science, Technology and Applications. The Electrochemical Society Proceedings Series.
Edited book, 2005
Editor
Karl Hobart
Charles Hunt
Helmut Baumgart
Tadatomo Suga
Stefan Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2)
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
1-56677-460-8