Ellipsometry studies of Si/Ge superlattices with embedded Ge dots
Journal article, 2013
Author
S. Kalem
TUBITAK Marmara Research Center
Örjan Arthursson
Chalmers, Microtechnology and Nanoscience (MC2), Nanofabrication Laboratory
P. Werner
Max Planck Society
Applied Physics A: Materials Science and Processing
0947-8396 (ISSN) 1432-0630 (eISSN)
Vol. 112 3 555-559Subject Categories
Nano Technology
DOI
10.1007/s00339-013-7781-5