Micromachining by sacrificial aluminium etching
Licentiate thesis, 1997
sacrificial aluminium etching
SALE
CMOS-compatible micromachining
aluminium etching
densitometer
surface micromachining
nozzle
sacrificial etching
inkjet
Author
David Westberg
Department of Solid State Electronics
Subject Categories (SSIF 2011)
Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
992-460935-2
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 271