sacrificial aluminium etching
SALE
CMOS-compatible micromachining
aluminium etching
densitometer
surface micromachining
nozzle
sacrificial etching
inkjet
Institutionen för fasta tillståndets elektronik
Elektroteknik och elektronik
992-460935-2
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 271