Epitaxial growth, processing and characterisation of III-V semiconductor micro- and nanostructures
Licentiate thesis, 1997
micromapping
MBE
dry etching
III-V semiconductor
processing
alternative precursor
SEM
photoluminescence
quantum wire
self-narrowing etching
wet chemical etching
MOVPE
Author
Otto Zsebök
Department of Microelectronics and Nanoscience
Subject Categories (SSIF 2011)
Nano Technology
ISBN
992-473289-8