High resolution displacement measurement of micromechanical structures : the RDGT
Licentiate thesis, 2000
FET
capacitive detection
displacement measure
silicon
Resonant double gate transistor
high resolution
RGT
MOSFET
resonant gate transistor
low impedance sensing
RDGT
Author
Anke Weinert
Department of Microelectronics
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
993-147161-1
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 334