High resolution displacement measurement of micromechanical structures : the RDGT
Licentiatavhandling, 2000
FET
capacitive detection
displacement measure
silicon
Resonant double gate transistor
high resolution
RGT
MOSFET
resonant gate transistor
low impedance sensing
RDGT
Författare
Anke Weinert
Institutionen för mikroelektronik
Ämneskategorier (SSIF 2011)
Annan elektroteknik och elektronik
ISBN
993-147161-1
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 334