High resolution displacement measurement of micromechanical structures : the RDGT
Licentiatavhandling, 2000

FET

capacitive detection

displacement measure

silicon

Resonant double gate transistor

high resolution

RGT

MOSFET

resonant gate transistor

low impedance sensing

RDGT

Författare

Anke Weinert

Institutionen för mikroelektronik

Ämneskategorier

Annan elektroteknik och elektronik

ISBN

993-147161-1

Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 334