Micromechanical three axis accelerometers : design, manufacture and general readout electronics
Licentiate thesis, 2000
three axis accelerometer
MEMS accelerometer
sensor test bench
sensor system
bilk micromaching
accelerometer design
Author
Henrik Rödjegård
Department of Microelectronics, Solid State Electronics
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
ISBN
993-366543-x
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 360