Micromechanical three axis accelerometers : design, manufacture and general readout electronics
Licentiatavhandling, 2000

three axis accelerometer

MEMS accelerometer

sensor test bench

sensor system

bilk micromaching

accelerometer design

Författare

Henrik Rödjegård

Institutionen för mikroelektronik, Fasta tillståndets elektronik

Ämneskategorier

Annan elektroteknik och elektronik

ISBN

993-366543-x

Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 360