Micromechanical three axis accelerometers : design, manufacture and general readout electronics
Licentiatavhandling, 2000
three axis accelerometer
MEMS accelerometer
sensor test bench
sensor system
bilk micromaching
accelerometer design
Författare
Henrik Rödjegård
Institutionen för mikroelektronik, Fasta tillståndets elektronik
Ämneskategorier
Annan elektroteknik och elektronik
ISBN
993-366543-x
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 360