Ultrathin gate oxides for future SiGe CMOS devices
Licentiate thesis, 2001
gate oxide
ultrathin
C-V
SiGe
valence band offset
Author
Alok Sareen
Department of Microelectronics
Subject Categories
Other Electrical Engineering, Electronic Engineering, Information Engineering
Technical report L - School of Electrical and Computer Engineering, Chalmers University of Technology. : 417