A novel technique for integration of optical elements onto silicon
Paper in proceedings, 2004
Author
Karin Hedsten
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Anders Magnusson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Jonas Melin
Henrik Röjdegård
Gert Andersson
Jörgen Bengtsson
Chalmers, Microtechnology and Nanoscience (MC2), Photonics
Peter Enoksson
Chalmers, Microtechnology and Nanoscience (MC2), Solid State Electronics
Fredrik Nikolajeff
David Karlén
OSA Conference: Diffractive Optics and Micro-Optics, DOMO 2004, Rochester, NY, October 2004
Subject Categories
Electrical Engineering, Electronic Engineering, Information Engineering