Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films
Journal article, 2014

Intrinsically tunable bulk acoustic wave resonators, based on sol-gel 0.70Pb(Mg1/3Nb2/3)O3- 0.30PbTiO3 (PMN-PT) thin films, with high effective electromechanical coupling coefficient of 13% and tunability of the series resonance frequency up to 4.0% are fabricated and characterized. The enhanced electroacoustic properties of the PMN-PT resonators are attributed to the mechanism of polarization rotation occurring in the region of the morphotropic phase boundary. Electroacoustic performance of the PMN-PT resonators is analyzed using the theory of dc fieldinduced piezoelectric effect in ferroelectrics. Extrinsic acoustic loss in the PMN-PT resonators is analyzed using the model of the wave scattering at reflections from rough interfaces. Mechanical Q-factor of the resonators is up to 70 at 4.1 GHz and limited mainly by losses in the PMN-PT film.

quality factor

ferroelectrics

roughness induced attenuation of acoustic waves.

sol-gel technique

intrinsically tunable film bulk acoustic wave (BAW) resonators

film microstructure

effective electromechanical coupling coefficient

0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 (PMN-PT) thin films

dc field induced piezoelectric effect

tunability of resonance frequency

morphotropic phase boundary

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Matjaz Spreitzer

Jozef Stefan Institute

Asja Veber

Jozef Stefan Institute

Danilo Suvorov

Jozef Stefan Institute

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Journal of Applied Physics

0021-8979 (ISSN) 1089-7550 (eISSN)

Vol. 116 6 Art. no. 064101- 064101

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Subject Categories

Communication Systems

Other Electrical Engineering, Electronic Engineering, Information Engineering

Infrastructure

Nanofabrication Laboratory

DOI

10.1063/1.4893179

More information

Latest update

3/9/2018 2