Intrinsically tunable bulk acoustic wave resonators based on sol-gel grown PMN-PT films
Artikel i vetenskaplig tidskrift, 2014

Intrinsically tunable bulk acoustic wave resonators, based on sol-gel 0.70Pb(Mg1/3Nb2/3)O3- 0.30PbTiO3 (PMN-PT) thin films, with high effective electromechanical coupling coefficient of 13% and tunability of the series resonance frequency up to 4.0% are fabricated and characterized. The enhanced electroacoustic properties of the PMN-PT resonators are attributed to the mechanism of polarization rotation occurring in the region of the morphotropic phase boundary. Electroacoustic performance of the PMN-PT resonators is analyzed using the theory of dc fieldinduced piezoelectric effect in ferroelectrics. Extrinsic acoustic loss in the PMN-PT resonators is analyzed using the model of the wave scattering at reflections from rough interfaces. Mechanical Q-factor of the resonators is up to 70 at 4.1 GHz and limited mainly by losses in the PMN-PT film.

quality factor

ferroelectrics

roughness induced attenuation of acoustic waves.

sol-gel technique

intrinsically tunable film bulk acoustic wave (BAW) resonators

film microstructure

effective electromechanical coupling coefficient

0.70Pb(Mg1/3Nb2/3)O3-0.30PbTiO3 (PMN-PT) thin films

dc field induced piezoelectric effect

tunability of resonance frequency

morphotropic phase boundary

Författare

Andrei Vorobiev

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Matjaz Spreitzer

Institut Jozef Stefan

Asja Veber

Institut Jozef Stefan

Danilo Suvorov

Institut Jozef Stefan

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap (MC2), Terahertz- och millimetervågsteknik

Journal of Applied Physics

0021-8979 (ISSN) 1089-7550 (eISSN)

Vol. 116 6 Art. no. 064101- 064101

Styrkeområden

Nanovetenskap och nanoteknik

Ämneskategorier

Kommunikationssystem

Annan elektroteknik och elektronik

Infrastruktur

Nanotekniklaboratoriet

DOI

10.1063/1.4893179