Electrically tunable device and a method relating thereto
Patent, 2003

A thin film ferroelectric varactor device comprising a substrate layer, a ferroelectric layer structure and an electrode structure is presented. The ferroelectric layer structure comprises a number of ferroelectric layers and a number of intermediate buffer layers arranged in an alternating manner. At least a first and a second layer of the ferroelectric layers have different Curie temperatures, i.e. the dielectric constant of the first ferroelectric layer has a maximum at a temperature which is different from the temperature at which the dielectric constant of the second ferroelectric layer has a maximum.


E. Wikborg

Department of Physics

Zdravko Ivanov

Department of Physics

Peter Petrov

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2)

Telefonaktiebolaget LM Ericsson


6563153 (B2

Subject Categories

Electrical Engineering, Electronic Engineering, Information Engineering

More information

Latest update