Electrically tunable device and a method relating thereto
Patent, 2003

A thin film ferroelectric varactor device comprising a substrate layer, a ferroelectric layer structure and an electrode structure is presented. The ferroelectric layer structure comprises a number of ferroelectric layers and a number of intermediate buffer layers arranged in an alternating manner. At least a first and a second layer of the ferroelectric layers have different Curie temperatures, i.e. the dielectric constant of the first ferroelectric layer has a maximum at a temperature which is different from the temperature at which the dielectric constant of the second ferroelectric layer has a maximum.

Författare

E. Wikborg

Institutionen för fysik

Zdravko Ivanov

Institutionen för fysik

Peter Petrov

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap (MC2)

Telefonaktiebolaget LM Ericsson

US06563153

6563153 (B2

Ämneskategorier

Elektroteknik och elektronik