Electrically tunable device and a method relating thereto
Patent, 2003

A thin film ferroelectric varactor device comprising a substrate layer, a ferroelectric layer structure and an electrode structure is presented. The ferroelectric layer structure comprises a number of ferroelectric layers and a number of intermediate buffer layers arranged in an alternating manner. At least a first and a second layer of the ferroelectric layers have different Curie temperatures, i.e. the dielectric constant of the first ferroelectric layer has a maximum at a temperature which is different from the temperature at which the dielectric constant of the second ferroelectric layer has a maximum.


E. Wikborg

Institutionen för fysik

Zdravko Ivanov

Institutionen för fysik

Peter Petrov

Spartak Gevorgian

Chalmers, Mikroteknologi och nanovetenskap

Telefonaktiebolaget LM Ericsson


6563153 (B2


Elektroteknik och elektronik

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