Tunable FBARs based on sol-gel grown PMN-PT films
Paper in proceeding, 2013

In this work possibilities of using of sol-gel grown PMN-PT films in tunable film bulk acoustic wave resonators are considered. More than 4% tuning of resonance frequency under DC field less than 15 V/μm is demonstrated. Linear and nonlinear electrostriction and induced piezoelectric coefficients of the PMN-PT films are evaluated.

nonlinear electrostriction coefficient

tunable FBAR

PMN-PT films

Author

Andrei Vorobiev

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Spartak Gevorgian

Chalmers, Microtechnology and Nanoscience (MC2), Terahertz and Millimetre Wave Laboratory

Matjaz Spreitzer

Jozef Stefan Institute

Asja Veber

Jozef Stefan Institute

Danilo Suvorov

Jozef Stefan Institute

43rd European Microwave Conference, EuMC 2013 - Held as Part of the 16th European Microwave Week, EuMW 2013, Nuremberg, Germany, 7-10 October 2013

1339-1342
978-287487031-6 (ISBN)

Subject Categories

Other Electrical Engineering, Electronic Engineering, Information Engineering

ISBN

978-287487031-6

More information

Latest update

3/9/2018 2