Tunable FBARs based on sol-gel grown PMN-PT films

Paper i proceeding, 2013

In this work possibilities of using of sol-gel grown PMN-PT films in tunable film bulk acoustic wave resonators are considered. More than 4% tuning of resonance frequency under DC field less than 15 V/μm is demonstrated. Linear and nonlinear electrostriction and induced piezoelectric coefficients of the PMN-PT films are evaluated.