Polymer Gap Adapter for Contactless, Robust, and Fast Measurements at 220-325 GHz
Journal article, 2016
SU8
polymer
Gap waveguide
microelectromechanical systems (MEMS)
GHz
radio frequency (RF)
Si
metamaterial
micromachining
high-frequency
pin flange
measurement adapters
Author
[Person 49d9382c-dc70-433d-9750-451690be2684 not found]
[Person 3d3d685b-71af-473d-8e81-2755d245a5ce not found]
[Person d9d50601-e763-4d94-9fa8-6910fd930149 not found]
[Person 85db5678-b6ed-4f0d-86dc-a1cdf1dc8679 not found]
[Person 0efda57e-bbf4-4563-ae9b-093cd6e56203 not found]
[Person a520d273-fc15-41f6-a969-ffa6635dea23 not found]
Journal of Microelectromechanical Systems
1057-7157 (ISSN)
Vol. 25 1 160-169 7346393Areas of Advance
Nanoscience and Nanotechnology
Production
Subject Categories (SSIF 2011)
Materials Engineering
Communication Systems
Electrical Engineering, Electronic Engineering, Information Engineering
Driving Forces
Innovation and entrepreneurship
Infrastructure
Myfab (incl. Nanofabrication Laboratory)
DOI
10.1109/jmems.2015.2500277