Nondestructive cleaning of the LaAlO3/SrTiO3 surface with ultraviolet light and ozone
Journal article, 2016

The effect of ultraviolet light produced ozone and irradiation (UV/ozone) cleaning on the surface properties and interface electrical properties of 4 unit cell (uc) LaAlO3/SrTiO3 samples is examined. A standard photolithography process is used to contaminate the samples which are then cleaned in UV/ozone. Atomic force microscopy measurements show that the photoresist contaminated samples can be cleaned efficiently using this method. The surface roughness of the cleaned samples is comparable to that of the as-grown samples. Furthermore, electrical transport measurements show that the mobility decreases and the sheet carrier density increases for the contaminated samples, which also display indications of an onset to the Kondo effect. By removing the contaminants with UV/ozone cleaning, the mobility and sheet carrier density can be partially restored toward the as-grown values. The mobility is increased by about two times from approximate to 1000 cm(2) V-1 s(-1) for the contaminated samples to approximate to 2000 cm(2) V-1 s(-1) for the ozone cleaned ones. (C) 2016 American Vacuum Society.

Author

Eric Andersson

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Pier Paolo Aurino

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Dag Winkler

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Alexei Kalaboukhov

Chalmers, Microtechnology and Nanoscience (MC2), Quantum Device Physics

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

2166-2754 (ISSN)

Vol. 34 4

Areas of Advance

Nanoscience and Nanotechnology (2010-2017)

Materials Science

Infrastructure

Nanofabrication Laboratory

Subject Categories

Condensed Matter Physics

DOI

10.1116/1.4944660

More information

Created

10/8/2017