Nondestructive cleaning of the LaAlO3/SrTiO3 surface with ultraviolet light and ozone
Artikel i vetenskaplig tidskrift, 2016

The effect of ultraviolet light produced ozone and irradiation (UV/ozone) cleaning on the surface properties and interface electrical properties of 4 unit cell (uc) LaAlO3/SrTiO3 samples is examined. A standard photolithography process is used to contaminate the samples which are then cleaned in UV/ozone. Atomic force microscopy measurements show that the photoresist contaminated samples can be cleaned efficiently using this method. The surface roughness of the cleaned samples is comparable to that of the as-grown samples. Furthermore, electrical transport measurements show that the mobility decreases and the sheet carrier density increases for the contaminated samples, which also display indications of an onset to the Kondo effect. By removing the contaminants with UV/ozone cleaning, the mobility and sheet carrier density can be partially restored toward the as-grown values. The mobility is increased by about two times from approximate to 1000 cm(2) V-1 s(-1) for the contaminated samples to approximate to 2000 cm(2) V-1 s(-1) for the ozone cleaned ones. (C) 2016 American Vacuum Society.

Författare

Eric Andersson

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Pier Paolo Aurino

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Dag Winkler

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Alexei Kalaboukhov

Chalmers, Mikroteknologi och nanovetenskap (MC2), Kvantkomponentfysik

Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics

2166-2754 (ISSN)

Vol. 34 4

Styrkeområden

Nanovetenskap och nanoteknik

Materialvetenskap

Infrastruktur

Nanotekniklaboratoriet

Ämneskategorier

Den kondenserade materiens fysik

DOI

10.1116/1.4944660

Mer information

Skapat

2017-10-08